✦ LIBER ✦

The effect of in situ photoexcitation on the generation of damaged structures during ion implantation into Si wafers

✍ Scribed by Shcherbachev, K D; Bublik, V T; Mordkovich, V N; Pazhin, D M

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of the interatomic Si-Si-potentia

✍ Nordlund, K; Keinonen, J; Kuronen, A 📂 Article 📅 1994 🏛 Royal Swedish Academy of Sciences 🌐 English ⚖ 434 KB

Influence of channeling effects on ion d

✍ Carnera, A. ;Gasparotto, A. ;Berti, M. ;Fabbri, R. 📂 Article 📅 1994 🏛 Springer-Verlag ⚖ 370 KB

The influence of sb impurities on ion im

✍ B. Zeroual; G. Carter 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 412 KB

Effect of MeV nitrogen ion implantation

✍ Byeong-Sam Moon, In-Ji Lee, Jea-Gun Park 📂 Article 📅 2012 🏛 The Korean Physical Society 🌐 English ⚖ 289 KB

Compositional effects on the radiation d

✍ J.K.N. Lindner 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 521 KB

The effect of ion-implantation damage on

✍ Yudong Kim; Hisham Z. Massoud; Richard B. Fair 📂 Article 📅 1989 🏛 Springer US 🌐 English ⚖ 835 KB