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Effect of MeV nitrogen ion implantation on the resistivity transition in Czochralski silicon wafers

✍ Scribed by Byeong-Sam Moon, In-Ji Lee, Jea-Gun Park

Book ID
119937120
Publisher
The Korean Physical Society
Year
2012
Tongue
English
Weight
289 KB
Volume
61
Category
Article
ISSN
0374-4884

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