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Effects of the ion energy on damage production in MeV ion-implanted GaAs

✍ Scribed by W Wesch; E Wendler; N Dharmarasu


Book ID
114164565
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
134 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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Sohd benzene has been unplanted with mert-gas Ions atth energes rangmg from 16 to 100 keV Ihe small varuuon observed UI the relarwe concentration of the products has been found to depend mamly on The fact that the r&awe acsht of the nuclear and electromc noppmg mechantsms IS changmg along the ener\_