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Damage production in GaAs during MeV ion implantation

✍ Scribed by O. Herre; E. Wendler; N. Achtziger; T. Licht; U. Reislöhner; M. Rüb; T. Bachmann; W. Wesch; P.I. Gaiduk; F.F. Komarov


Book ID
114168428
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
663 KB
Volume
120
Category
Article
ISSN
0168-583X

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