✦ LIBER ✦
Damage accumulation and amorphization in GaAs by MeV Si+ ion implantation at different tilt angles
✍ Scribed by Zhao Qing-tai; Wang Zhong-lie; Xu Tian-bing; Zhu Pei-ran; Zhou Jun-si
- Book ID
- 113285619
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 481 KB
- Volume
- 90
- Category
- Article
- ISSN
- 0168-583X
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