✦ LIBER ✦

Influence of channeling effects on ion distribution and damage profiles during high energy ion implantation in Si

✍ Scribed by Carnera, A. ;Gasparotto, A. ;Berti, M. ;Fabbri, R.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Macrodefect formation in semiconductors

✍ S.A. Fedotov; V.S. Varichenko; A.M. Zaitsev; M. Ishimaru; Y. Hiroyama; T. Motook 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 351 KB

Si nanoparticle formation in SiO2 by Si

✍ L. Nikolova; R.G. Saint-Jacques; C. Dahmoune; G.G. Ross 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 858 KB

The effect of ion implantation energy an

✍ Y.T. Chong; Q. Li; C.F. Chow; N. Ke; W.Y. Cheung; S.P. Wong; K.P. Homewood 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 252 KB