✦ LIBER ✦
Macrodefect formation in semiconductors during high energy ion implantation: Monte Carlo simulation of damage depth distributions
✍ Scribed by S.A. Fedotov; V.S. Varichenko; A.M. Zaitsev; M. Ishimaru; Y. Hiroyama; T. Motooka
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 351 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.