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Effect of the interatomic Si-Si-potential on vacancy production during ion implantation of Si

✍ Scribed by Nordlund, K; Keinonen, J; Kuronen, A

Book ID: 125498811
Publisher: Royal Swedish Academy of Sciences
Year: 1994
Tongue: English
Weight: 434 KB
Volume: T54
Category: Article
ISSN: 0031-8949
DOI: 10.1088/0031-8949/1994/T54/007

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