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The effect of deposition RF power on the SiC passivation layer synthesized by an RF magnetron sputtering method

✍ Scribed by Jae Keun Seo; Ki-han Ko; Won Seok Choi; Mungi Park; Jong Hwan Lee; Jun-Sin Yi

Book ID
108166330
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
241 KB
Volume
326
Category
Article
ISSN
0022-0248

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πŸ“œ SIMILAR VOLUMES

The dependence of deposition rate on pow
The dependence of deposition rate on power input for dc and rf magnetron sputtering
✍ AR Nyaiesh; L Holland πŸ“‚ Article πŸ“… 1981 πŸ› Elsevier Science 🌐 English βš– 264 KB

An earlier study of the magnetron sputtering of copper in this laboratory has shown that the growth rate in Ar for a dc magnetron is almost twice that for an rf system with an identical target, operated at the same indicated power input. Experiments have been made to find whether the difference in t