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Influence of the target/shield distance on the coatings deposition by rf magnetron sputtering

✍ Scribed by N Filipe; A Cavaleiro; MT Vieira

Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
232 KB
Volume
45
Category
Article
ISSN
0042-207X

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✍ van Dijk, K. ;Schaeken, H. G. ;Wolke, J. C. G. ;MarΓ©e, C. H. M. ;Habraken, F. H. πŸ“‚ Article πŸ“… 1995 πŸ› John Wiley and Sons 🌐 English βš– 640 KB

The effects of discharge radiofrequency (RF) power and film thickness were studied on the characteristics of Ca5(P0,),0H (hydroxyapatite) thin films fabricated by RF magnetron sputtering. The structure and chemical composition were investigated with a-step (thickness), scanning electron microscopy (