𝔖 Bobbio Scriptorium

✦ LIBER ✦

The comparisons of growth mechanisms for Si thin films with different deposition rates in CVD process by the description of the roughness evolution

✍ Scribed by F. Liu; Z. Sun; W. Zi; Y. Zhou; M. Zhu

Book ID: 116671010
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 454 KB
Volume: 354
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2007.10.055

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface roughness evolution in the growt

Surface roughness evolution in the growth of a-Si:H thin films studied by ellipsometry

✍ A. Canillas; J. Campmany; J.L. Andújar; E. Bertran; J.L. Morenza 📂 Article 📅 1991 🏛 Elsevier Science ⚖ 60 KB

Surface roughness evolution in the growt

Surface roughness evolution in the growth of a-Si: H thin films studied by ellipsometry

✍ A. Canillas; J. Campmany; J.L. Andújar; E. Bertran; J.L. Morenza 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 414 KB

Some indications of different film formi

Some indications of different film forming radicals in a-Si:H deposition by the glow discharge and thermocatalytic CVD processes

✍ B Schröder; S Bauer 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 131 KB

Study of the interfaces in resistive swi

Study of the interfaces in resistive switching NiO thin films deposited by both ALD and e-beam coupled with different electrodes (Si, Ni, Pt, W, TiN)

✍ A. Lamperti; S. Spiga; H.L. Lu; C. Wiemer; M. Perego; E. Cianci; M. Alia; M. Fan 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 385 KB

Oxygen interaction of CdS-based gas sens

Oxygen interaction of CdS-based gas sensors with different stoichiometric compositions was studied by X-ray photoelectron spectroscopy (XPS) and thermal-desorption mass spectroscopy observations combined with conductivity measurements. Three different types of film with different atomic ratios of Cd/S were used in the study of oxygen chemisorption in a low-temperature range between 300 and 570 K. Spray pyrolysis was used for the deposition of the films on glass substrates; XPS and energy dispersive spectroscopy of X-ray together with atomic force microscopy and scanning electron microscopy were used for the characterization of the composition and structure of the films. It was possible to distinguish different temperature ranges for the thermal desorption of the different adsorbed oxygen species. A comparison of the data from XPS and mass-spectroscopy observations with conductance measurements allows to conclude that metallic surface atoms are responsible for different interactions of oxygen species with CdS surfaces.

📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB