Some indications of different film forming radicals in a-Si:H deposition by the glow discharge and thermocatalytic CVD processes

✍ Scribed by B Schröder; S Bauer

• Book ID: 117150293
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 131 KB
• Volume: 266-269
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(99)00762-0