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Surface roughness evolution in the growth of a-Si:H thin films studied by ellipsometry

✍ Scribed by A. Canillas; J. Campmany; J.L. Andújar; E. Bertran; J.L. Morenza

Publisher
Elsevier Science
Year
1991
Weight
60 KB
Volume
251-252
Category
Article
ISSN
0167-2584

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## Abstract The ellipsometry and RHEED study of high‐quality MCT films grown on (112)‐ and (130) CdTe and GaAs by MBE was carried out. The dependence of the ellipsometric parameter ψ on MCT composition is evaluated. It was shown that such parameters as growth rate, the surface roughness, initial su