✦ LIBER ✦
A LEED, AES and TDS study of very thin nitride film growth on Si(100) by direct thermal nitridation in NH3
✍ Scribed by A. Glachant; D. Saidi; J.F. Delord
- Publisher
- Elsevier Science
- Year
- 1986
- Weight
- 44 KB
- Volume
- 168
- Category
- Article
- ISSN
- 0167-2584
No coin nor oath required. For personal study only.