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The chemical vapour deposition of indium and copper/indium alloys from metal hexafluoracetylacetonate complexes

✍ Scribed by Philip A. Jones; Andrew D. Jackson; Richard D. Pilkington; Paul D. Lickiss

Book ID: 118367507
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 182 KB
Volume: 229
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90398-9

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