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Experimental and theoretical study of InP homoepitaxy by chemical vapour deposition from gaseous indium chloride and hydrogen diluted phosphine

✍ Scribed by L. Chaput; R. Cadoret; M. Mihailovic


Book ID
103166203
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
526 KB
Volume
112
Category
Article
ISSN
0022-0248

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