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The characterization of the optical functions of BCP and CBP thin films by spectroscopic ellipsometry

✍ Scribed by Z.T. Liu; C.Y. Kwong; C.H. Cheung; A.B. Djurišić; Y. Chan; P.C. Chui

Book ID: 116897466
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 188 KB
Volume: 150
Category: Article
ISSN: 0379-6779
DOI: 10.1016/j.synthmet.2005.02.001

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## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter