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Optical Characterization of Thin Colloidal Gold Films by Spectroscopic Ellipsometry

✍ Scribed by Kooij, E. Stefan; Wormeester, Herbert; Brouwer, E. A. Martijn; van Vroonhoven, Esther; van Silfhout, Arend; Poelsema, Bene

Book ID
120712058
Publisher
American Chemical Society
Year
2002
Tongue
English
Weight
247 KB
Volume
18
Category
Article
ISSN
0743-7463

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## Abstract Silicon oxynitride (SiO~x~ N~y~) thin films were deposited on silicon substrates by ion‐assisted deposition. Variable angle spectroscopic ellipsometry (VASE) was used to optically characterize the deposited film properties, such as layer thickness and composition, film surface and inter