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Texture Development in Titanium Nitride Films Grown by Low-Energy Ion Assisted Deposition

✍ Scribed by B. Rauschenbach; J.W. Gerlach

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 410 KB
Volume: 35
Category: Article
ISSN: 0232-1300
DOI: 10.1002/1521-4079(200007)35:6/7<675::aid-crat675>3.0.co;2-7

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