Investigation of titanium nitride films prepared by Xe+ ion beam enhanced deposition in a N2 gas environment

✍ Scribed by Wang Xi; Yang Genqing; Zheng Zhihong; Huang Wei; Zhou Zuyao; Liu Xianghuai; Zou Shichang

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 117 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91448-w