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Temperature, roughness and depth resolution in ion sputter profiles

✍ Scribed by M.P. Seah; Maria Kühlein

Book ID
118985981
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
832 KB
Volume
150
Category
Article
ISSN
0039-6028

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Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces
✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf