STM and AES study of the relation between ion sputter induced roughness and depth resolution

Influence of ion mixing, ion beam-induce

Influence of ion mixing, ion beam-induced roughness and temperature on the depth resolution of sputter depth profiling of metallic bilayer interfaces

✍ Eun-Hee Cirlin; Yang-Tse Cheng; Philip Ireland; Bruce Clemens 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 730 KB

## Abstract To study the factors limiting the depth resolution of sputter depth profiling, we have examined the influence of ion mixing, ion beam‐induced roughness and temperature on the interface resolution of metallic bilayers consisting of Pt on top of Ni or Ti. We studied Pt/Ni and Pt/Ti interf