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Temperature effect on the nitrogen insertion in carbon nitride films deposited by ECR

✍ Scribed by Bouchet-Fabre, B.; Fernandez, V.; Gohier, A.; Parent, Ph.; Laffon, C.; Angleraud, B.; Tessier, P.Y.; Minea, T.M.

Book ID: 122720259
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 684 KB
Volume: 18
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2009.01.042

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