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The effect of nitrogen incorporation in DLC films deposited by ECR Microwave Plasma CVD

✍ Scribed by Seker, Z.; Ozdamar, H.; Esen, M.; Esen, R.; Kavak, H.

Book ID: 125489391
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 679 KB
Volume: 314
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2014.06.137

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