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Effect of nitrogen incorporation into diamond-like carbon films by ECR-CVD

โœ Scribed by Fung, M.K; Chan, W.C; Gao, Z.Q; Bello, I; Lee, C.S; Lee, S.T


Book ID
122459428
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
152 KB
Volume
8
Category
Article
ISSN
0925-9635

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