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Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications

✍ Scribed by Xin Li; Zhen-an Tang; Xin-lu Deng; Yu-xiu Shen; Hai-tao Ding

Book ID: 105679676
Publisher: Wuhan University of Technology
Year: 2004
Tongue: English
Weight: 583 KB
Volume: 19
Category: Article
ISSN: 1000-2413
DOI: 10.1007/bf03000166

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