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Spectroscopic study on pulsed laser ablation of graphite target in ECR nitrogen plasma for carbon nitride film deposition

✍ Scribed by Shen, X.K.; Sun, J.; Xu, N.; Ying, Z.F.; Shi, L.Q.; Wu, A.M.; Gong, Z.S.; Wu, J.D.


Book ID
123131260
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
378 KB
Volume
15
Category
Article
ISSN
0925-9635

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