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Influences of substrate bias on the composition and structure of carbon nitride thin films prepared by ECR-plasma assisted pulsed laser deposition

✍ Scribed by Ling, H; Wu, J.D; Sun, J; Shi, W; Ying, Z.F; Xu, N; Pan, W.J; Ding, X.M; Zhou, Z.Y


Book ID
121780233
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
150 KB
Volume
11
Category
Article
ISSN
0925-9635

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