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Influence of deposition pressure on the composition and structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation

✍ Scribed by Y.H. Cheng; Z.H. Sun; B.K. Tay; S.P. Lau; X.L. Qiao; J.G. Chen; Y.P. Wu; C.S. Xie; Y.Q. Wang; D.S. Xu; S.B. Mo; Y.B. Sun


Book ID
108417498
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
159 KB
Volume
182
Category
Article
ISSN
0169-4332

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