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TEM study of the two-step annealing of arsenic-implanted ť100〉 silicon

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📜 SIMILAR VOLUMES

TEM Investigation of the annealing behav

✍ Nabert, G. ;Habermeier, H.-U. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 317 KB

Dose Dependence of the Flash Lamp Anneal

✍ Panknin, D. ;Wieser, E. ;Klabes, R. ;Syhre, H. 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 479 KB

The annealing characteristics of arsenic

✍ Wagner, C. ;El-Sadek, A. ;Mechelke, H.-J. 📂 Article 📅 1981 🏛 John Wiley and Sons 🌐 English ⚖ 448 KB

TEM Study of the Molecular Effect in Pho

✍ Shi, T. S. ;De Veirman, A. ;Van Landuyt, J. ;Yang, G. Q. ;Lin, C. L. 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 190 KB

The Behaviour of Arsenic in Crystals of

✍ Komakov, F. F. ;Novikov, A. P. ;Kotov, E. V. ;Podlipko, E. A. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 268 KB

The annealing behaviour of arsenic-impla

✍ Wagner, C. ;El-Sadek, A. 📂 Article 📅 1984 🏛 John Wiley and Sons 🌐 English ⚖ 402 KB