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TEM study of the origin of the surface microroughness in DSL photoetched Si-implanted GaAs wafers

✍ Scribed by C. Frigeri; J.L. Weyher; M. De Potter

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 733 KB
Volume: 50
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90148-d

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