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4141. Theoretical studies of Si and GaAs surfaces and initial steps in the oxidation. (USA)


Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
119 KB
Volume
29
Category
Article
ISSN
0042-207X

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Theoretical and experimental studies of
✍ R. Badheka; M. Wadsworth; D. G. Armour; J. A. van den Berg; J. B. Clegg πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 905 KB

## Abstract Delta‐doped structures represent a powerful class of test structures to investigate the experimental and fundamental factors limiting the depth resolution obtainable in SIMS sputter depth profiling. In this work, theoretical studies of the effects on the broadening of an Si delta spike