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Takeoff angle‐dependent x‐ray fluorescence of layered materials using a glancing incident x‐ray beam

✍ Scribed by Tsuji, Kouichi; Hirokawa, Kichinosuke


Book ID
118063199
Publisher
American Institute of Physics
Year
1994
Tongue
English
Weight
900 KB
Volume
75
Category
Article
ISSN
0021-8979

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A thermally stable Ni-based ohmic contact is one of the most attractive contact materials for developing superior GaAs devices. To understand the interface reaction between an Ni thin film and a GaAs wafer, a combined grazing-incidence and grazing-takeoff x-ray fluorescence (GIT-XRF) method was appl