Glancing-incidence and glancing-takeoff
Glancing-incidence and glancing-takeoff x-ray fluorescence analysis of NiโGaAs interface reactions
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Kouichi Tsuji; Kazuaki Wagatsuma; Takeo Oku
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Article
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2000
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John Wiley and Sons
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English
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A thermally stable Ni-based ohmic contact is one of the most attractive contact materials for developing superior GaAs devices. To understand the interface reaction between an Ni thin film and a GaAs wafer, a combined grazing-incidence and grazing-takeoff x-ray fluorescence (GIT-XRF) method was appl