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Systematic study of the evolution of texture and electrical properties of ZrNx thin films by reactive DC magnetron sputtering

โœ Scribed by Chuan-Pu Liu; Heng-Ghieh Yang

Book ID
108388767
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
248 KB
Volume
444
Category
Article
ISSN
0040-6090

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp