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Surface and electrical properties of NiCr thin films prepared by DC magnetron sputtering

โœ Scribed by Jicheng Zhou; Li Tian; Jianwu Yan


Book ID
107403490
Publisher
Wuhan University of Technology
Year
2008
Tongue
English
Weight
188 KB
Volume
23
Category
Article
ISSN
1000-2413

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Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp