Structural and surface properties of NiCr thin films prepared by DC magnetron sputtering under variation of annealing conditions
β Scribed by Yong Kwon; Nam-Hoon Kim; Gwang-Pyo Choi; Woo-Sun Lee; Yong-Jin Seo; Jinseong Park
- Book ID
- 108207505
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 581 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Crβdoped ZnO thin films have been prepared on silicon substrates by magnetron sputtering method. The effects of annealing on the compositions, crystallographic structures, and optical properties of the thin films are systematically investigated by energy dispersive spectroscopy, Xβray d
Thin films of ZrO 2 were prepared by reactive magnetron sputtering. Annealing of the films exhibited a drastic change in the properties due to improved crystallinity and packing density. The root mean square roughness of the sample observed from atomic force microscope is about 5.75 nm which is comp