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Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering

โœ Scribed by M.A. Moreira; I. Doi; J.F. Souza; J.A. Diniz

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
870 KB
Volume
88
Category
Article
ISSN
0167-9317

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