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Physical Properties of Zinc Oxide Films Prepared by dc Reactive Magnetron Sputtering at Different Sputtering Pressures

✍ Scribed by T.K. Subramanyam; B. Srinivasulu Naidu; S. Uthanna

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 125 KB
Volume: 35
Category: Article
ISSN: 0232-1300
DOI: 10.1002/1521-4079(200010)35:10<1193::aid-crat1193>3.0.co;2-6

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