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Synthesis of β-SiC thin films for high temperature sensors by the activated reactive evaporation process

✍ Scribed by Y.H.C. Cha; S. Jou; S. Prakash; H.J. Doerr; R.F. Bunshah

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 462 KB
Volume: 163
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(93)90791-c

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