Electrical properties of polycrystalline β-SiC thin films for high temperature sensors grown by the activated reactive evaporation process

✍ Scribed by Y.H.C. Cha; H.J. Doerr; R.F. Bunshah

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 486 KB
• Volume: 62
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(93)90322-f