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Synthesis of SiOF nanoporous ultra low-k thin film

✍ Scribed by Mhaisagar, Yogesh S.; Mahajan, Ashok M.

Book ID
121601722
Publisher
Springer US
Year
2013
Tongue
English
Weight
412 KB
Volume
24
Category
Article
ISSN
0957-4522

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## Abstract Nanoporous poly(methyl silsesquioxane) PMSSQ thin films for low‐k application have been prepared using chemically attached adamantylphenols as pore generating materials (porogen). To obtain the mechanically stable porous structure, multifunctional 1,2‐bistrimethoxysilylethane (BTMSE) wa