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Characterization of Nanoporous Low- k Thin Films by Small-Angle Neutron Scattering Contrast Variation

✍ Scribed by Hedden, Ronald C.; Lee, Hae-Jeong; Bauer, Barry J.


Book ID
126264893
Publisher
American Chemical Society
Year
2004
Tongue
English
Weight
147 KB
Volume
20
Category
Article
ISSN
0743-7463

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