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Ultra thin CVD TiN layers as diffusion barrier films on porous low-k materials

✍ Scribed by J. Bonitz; S.E. Schulz; T. Gessner

Book ID: 108207359
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 480 KB
Volume: 76
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.07.025

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