Facile and Controlled Synthesis of Ultra-Thin Low Dielectric Constant Meso/Microporous Silica Films

Structural control and properties of low

Structural control and properties of low-dielectric-constant poly(hydrogen silsesquioxane) precursors and their thin films

✍ Wei-Chih Liu; Yang-Yen Yu; Wen-Chang Chen 📂 Article 📅 2003 🏛 John Wiley and Sons 🌐 English ⚖ 118 KB 👁 2 views

## Abstract The precursors of poly(hydrogen silsesquioxane) (PHSSQ) were synthesized from triethoxysilane (TES) through variations in the pH and molar ratio of water to TES (__R__~1~). The molecular structures of the prepared PHSSQ precursors were controlled by the reaction conditions, including th