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Synthesis of silicon carbonitride dielectric films with improved optical and mechanical properties from tetramethyldisilazane

✍ Scribed by Fainer, N. I.; Golubenko, A. N.; Rumyantsev, Yu. M.; Kesler, V. G.; Maximovskii, E. A.; Ayupov, B. M.; Kuznetsov, F. A.

Book ID: 120309152
Publisher: SP MAIK Nauka/Interperiodica
Year: 2013
Tongue: English
Weight: 529 KB
Volume: 39
Category: Article
ISSN: 1087-6596
DOI: 10.1134/S1087659613010057

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