Synthesis of Diamond Thin Films by Thermal CVD Using Organic Compounds

✍ Scribed by Hirose, Yoichi; Terasawa, Yuki

• Book ID: 117996776
• Publisher: Institute of Pure and Applied Physics
• Year: 1986
• Tongue: English
• Weight: 538 KB
• Volume: 25
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.25.l519

✦ Synopsis

Diamond thin films have been formed by thermal chemical vapor deposition (thermal CVD) using the organic compounds such as CH3OH, C2H5OH, CH3COCH3 C2H5OC2H5, and (CH3)3N. The films are grown on the silicon substrates with high growth rate (8–10 µm/h) under the pressure ranging 1–800 Torr. This growth rate is ten or several ten times faster than the CVD method using hydrocarbons such as CH4 and C2H2. The films have good crystallinity and high quality in the sense of electron diffraction and Raman spectrum. The Vicker's hardness of the film is about 10000 kg/mm2 and the gravity of that is about 3.52 g/cm3.