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Synthesis of nanocrystalline diamond films using microwave plasma CVD

✍ Scribed by Yoshikawa, Hiromichi; Morel, Cedric; Koga, Yoshinori

Book ID: 122680673
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 547 KB
Volume: 10
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(01)00414-9

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## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 °C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea