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Pulsed plasmas study of linear antennas microwave CVD system for nanocrystalline diamond film growth

✍ Scribed by Vlcek, Jan; Fendrych, Frantisek; Taylor, Andrew; Novotny, Michal; Liehr, Michael

Book ID
120076131
Publisher
Cambridge University Press
Year
2011
Tongue
English
Weight
264 KB
Volume
27
Category
Article
ISSN
0884-2914

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Growth of nanocrystalline diamond films
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## Abstract Nanocrystalline diamond (NCD) films were grown by microwave plasma CVD in hydrogen‐based gas mixture. Deposition experiments were performed at different temperatures varying from 370 to 1100 Β°C. Before growth step, silicon (100) oriented substrates were nucleated by bias enhanced nuclea