✦ LIBER ✦
Large-area surface wave plasmas using microwave multi-slot antennas for nanocrystalline diamond film deposition
✍ Scribed by Kim, J; Tsugawa, K; Ishihara, M; Koga, Y; Hasegawa, M
- Book ID
- 120075984
- Publisher
- Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 573 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0963-0252
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